@inproceedings{dezest:hal-01144194,
  TITLE = {{PZT Nanofilm-Based Wafer Scale Nanoresonators}},
  AUTHOR = {Dezest, Denis and Mathieu, Fabrice and Mazenq, Laurent and Nicu, Liviu and Soyer, Caroline and Costecalde, Jean and Thomas, Olivier and Remiens, Denis},
  URL = {https://hal.science/hal-01144194},
  BOOKTITLE = {{IEEE Frequency Control Symposium}},
  ADDRESS = {Denver, United States},
  HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 15160},
  PAGES = {6p.},
  YEAR = {2015},
  MONTH = Apr,
  KEYWORDS = {NEMS ; actuators ; PZT ; piezoelectric acutation},
  PDF = {https://hal.science/hal-01144194v1/file/5086%20-%20Dezest%20et%20al.pdf},
  HAL_ID = {hal-01144194},
  HAL_VERSION = {v1},
}