@article{dezest:hal-01169283,
  TITLE = {{Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)}},
  AUTHOR = {Dezest, Denis and Thomas, Olivier and Mathieu, Fabrice and Mazenq, Laurent and Soyer, Caroline and Costecalde, Jean and Remiens, Denis and De{\"u}, Jean-Fran{\c c}ois and Nicu, Liviu},
  URL = {https://hal.science/hal-01169283},
  JOURNAL = {{Journal of Micromechanics and Microengineering}},
  HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 14559},
  PUBLISHER = {{IOP Publishing}},
  VOLUME = {25},
  NUMBER = {3},
  PAGES = {35002-35013},
  YEAR = {2015},
  MONTH = Jan,
  DOI = {10.1088/0960-1317/25/3/035002},
  KEYWORDS = {PZT ; NEMS ; Large-scale integration},
  PDF = {https://hal.science/hal-01169283v1/file/LSIS_JMM_2015_THOMAS.pdf},
  HAL_ID = {hal-01169283},
  HAL_VERSION = {v1},
}