@inproceedings{thomas:hal-01203229,
  TITLE = {{Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities}},
  AUTHOR = {Thomas, Olivier and Mathieu, Fabrice and Mansfield, W. and Huang, C. and Trolier-Mckinstry, S. and Nicu, Liviu},
  URL = {https://hal.science/hal-01203229},
  BOOKTITLE = {{26th IEEE international conference on micro electro mechanical systems (MEMS 2013)}},
  ADDRESS = {Taipei, Taiwan},
  YEAR = {2013},
  MONTH = Jan,
  DOI = {10.1109/MEMSYS.2013.6474310},
  KEYWORDS = {Piezoelectric},
  PDF = {https://hal.science/hal-01203229v1/file/LSIS_2013_MEMS_THOMAS.pdf},
  HAL_ID = {hal-01203229},
  HAL_VERSION = {v1},
}