@inproceedings{fuinel:hal-01279717,
  TITLE = {{HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS}},
  AUTHOR = {Fuinel, C{\'e}cile and Daff{\'e}, Khadim and Laborde, Adrian and Thomas, Olivier and Mazenq, Laurent and Nicu, Liviu and Leichle, Thierry and Legrand, Bernard},
  URL = {https://hal.science/hal-01279717},
  BOOKTITLE = {{The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)}},
  ADDRESS = {Shanghai, China},
  ORGANIZATION = {{IEEE}},
  HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 16029},
  YEAR = {2016},
  MONTH = Jan,
  DOI = {10.1109/MEMSYS.2016.7421850},
  PDF = {https://hal.science/hal-01279717v1/file/Fuinel_paper.pdf},
  HAL_ID = {hal-01279717},
  HAL_VERSION = {v1},
}