@article{guillon:hal-01343625,
  TITLE = {{Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers}},
  AUTHOR = {Guillon, Samuel and Saya, Daisuke and Mazenq, Laurent and Perisanu, Sorin and Vincent, Pascal and Lazarus, Arnaud and Thomas, Olivier and Nicu, Liviu},
  URL = {https://hal.science/hal-01343625},
  JOURNAL = {{Nanotechnology}},
  HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 11218},
  PUBLISHER = {{Institute of Physics}},
  VOLUME = {22},
  NUMBER = {24},
  PAGES = {id 245501},
  YEAR = {2011},
  MONTH = Jun,
  DOI = {10.1088/0957-4484/22/24/245501},
  KEYWORDS = {Nanocantilevers ; Vibration ; Silicon},
  PDF = {https://hal.science/hal-01343625v1/file/nano.pdf},
  HAL_ID = {hal-01343625},
  HAL_VERSION = {v1},
}