@inproceedings{saya:hal-01816372,
  TITLE = {{Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films}},
  AUTHOR = {Saya, Daisuke and Dezest, Denis and Leichle, Thierry and Mathieu, Fabrice and Nicu, Liviu and Thomas, Olivier and Welsh, Aaron and Trolier-Mckinstry, Susan},
  URL = {https://laas.hal.science/hal-01816372},
  BOOKTITLE = {{2017 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM)}},
  ADDRESS = {Atlanta, United States},
  HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 17632},
  PUBLISHER = {{IEEE}},
  YEAR = {2017},
  MONTH = May,
  DOI = {10.1109/ISAF.2017.8000219},
  KEYWORDS = {NEMS ; piezoelectricity ; microcontact printing ; PZT ; cantilever ; resonator},
  PDF = {https://laas.hal.science/hal-01816372v1/file/saya2017.pdf},
  HAL_ID = {hal-01816372},
  HAL_VERSION = {v1},
}