@article{saya:hal-02453806,
  TITLE = {{Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films}},
  AUTHOR = {Saya, Daisuke and Dezest, Denis and Welsh, Aaron and Mathieu, Fabrice and Thomas, Olivier and Leichle, Thierry and Trolier-Mckinstry, Susan and Nicu, Liviu},
  URL = {https://hal.science/hal-02453806},
  JOURNAL = {{Journal of Micromechanics and Microengineering}},
  HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 20377},
  PUBLISHER = {{IOP Publishing}},
  VOLUME = {30},
  NUMBER = {3},
  PAGES = {035004},
  YEAR = {2020},
  MONTH = Mar,
  DOI = {10.1088/1361-6439/ab60bf},
  PDF = {https://hal.science/hal-02453806v2/file/CP-PZT-JMM%20V12.pdf},
  HAL_ID = {hal-02453806},
  HAL_VERSION = {v2},
}