@inproceedings{dezest:hal-03165172,
  TITLE = {{Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators}},
  AUTHOR = {Dezest, Denis and Mathieu, Fabrice and Mazenq, Laurent and Soyer, Caroline and Costecalde, Jean and Remiens, Denis and Thomas, Olivier and De{\"u}, Jean-Fran{\c c}ois and Nicu, Liviu},
  URL = {https://hal.science/hal-03165172},
  BOOKTITLE = {{2013 Nanomechanical Sensing Workshop}},
  ADDRESS = {Stanford, USA, United States},
  PAGES = {0},
  YEAR = {2013},
  MONTH = May,
  KEYWORDS = {Wafer-scale integration ; Piezoelectric ; Nanoelectromecanical systems resonators},
  PDF = {https://hal.science/hal-03165172v1/file/LSIS_NMC_2013_THOMAS.pdf},
  HAL_ID = {hal-03165172},
  HAL_VERSION = {v1},
}