@inproceedings{kutyla:hal-03836081,
  TITLE = {{Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging}},
  AUTHOR = {Kutyla, Charlotte and Lemettre, Sylvain and Bessouet, Cl{\'e}ment and Bosseboeuf, Alain and Coste, Philippe and Sauvage, Thierry and Wendling, Olivier and Bellamy, Aurelien and Jagtap, Piyush and Escoubas, Stephanie and Guichet, Christophe and Thomas, Olivier and Moulin, Johan},
  URL = {https://hal.science/hal-03836081},
  BOOKTITLE = {{Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)}},
  ADDRESS = {Pont-a-Mousson, France},
  PAGES = {1-4},
  YEAR = {2022},
  MONTH = Jul,
  DOI = {10.1109/DTIP56576.2022.9911710},
  KEYWORDS = {lowtemperature bonding ; thin films ; getter ; oxidation ; Yttrium alloys},
  PDF = {https://hal.science/hal-03836081v1/file/PaperC_Kutyla-DTIP22Vf.pdf},
  HAL_ID = {hal-03836081},
  HAL_VERSION = {v1},
}